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Accordion structured porous silicon membranes: Application to contamination detection of organic volatile by FTIR spectroscopy
Journal article   Peer reviewed

Accordion structured porous silicon membranes: Application to contamination detection of organic volatile by FTIR spectroscopy

S. Cavalaglio, L. Robert and B. Gauthier-Manuel
Journal of membrane science, Vol.383(1-2), pp.250-253
01/11/2011
DOI: https://doi.org/10.1016/j.memsci.2011.08.056

Abstract

Engineering Engineering, Chemical Physical Sciences Polymer Science Science & Technology Technology
We report here the design of a new three-dimensional structured porous silicon membrane having an accordion shape by anodizing of anisotropic KOH etched silicon wafer. A complete process is described and an application example as contamination detection of organic volatile by FTIR spectroscopy is proposed. (C) 2011 Elsevier B.V. All rights reserved.

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