Air-gap polysilicon Thin film transistors on glass substrates

Journal article

Peer reviewed

H. Mahfoz-Kotb, Anne-Claire Salaün, Tayeb Mohammed-Brahim, Nathalie Coulon, Olivier Bonnaud and H Kotb

Sensors and actuators. A. Physical, Vol.113(3), pp.344-349

16/08/2004

Abstract

Engineering Sciences

Micro and nanotechnologies

Microelectronics

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Title: Air-gap polysilicon Thin film transistors on glass substrates
Creators - without role: H. Mahfoz-Kotb - Institut d'Electronique et de Télécommunications de Rennes
Anne-Claire Salaün - University of Rennes
Tayeb Mohammed-Brahim - University of Rennes
Nathalie Coulon - University of Rennes
Olivier Bonnaud - University of Rennes
H Kotb - King Faisal University
Publication Details: Sensors and actuators. A. Physical, Vol.113(3), pp.344-349
Publisher: Elsevier
Identifiers: 9919875808331
Academic Unit: King Faisal University
Language: English
Resource Type: Journal article