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Analysis of TMGa/NH3/H2 reaction system in GaN-MOVPE growth by computational simulation
Journal article   Peer reviewed

Analysis of TMGa/NH3/H2 reaction system in GaN-MOVPE growth by computational simulation

A. Hirako, S. Koiso and K. Ohkawa
Physica status solidi. A, Applications and materials science, Vol.203(7), pp.1716-1719
05/2006

Abstract

81.05.Ea 81.15.Aa 81.15.Kh 82.33.Ya

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