Atomic force microscopy-induced nanopatterning of Si(100) surfaces

Journal article

Peer reviewed

L Santinacci, T Djenizian and P Schmuki

Journal of the Electrochemical Society, Vol.148(9), pp.C640-C646

01/09/2001

Abstract

Applied sciences

Cross-disciplinary physics: materials science; rheology

Electrodeposition, electroplating

Electronics

Exact sciences and technology

Materials science

Metals. Metallurgy

Methods of deposition of films and coatings; film growth and epitaxy

Microelectronic fabrication (materials and surfaces technology)

Physics

Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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Title: Atomic force microscopy-induced nanopatterning of Si(100) surfaces
Creators - without role: L Santinacci - Friedrich-Alexander-Universität Erlangen-Nürnberg
T Djenizian - Friedrich-Alexander-Universität Erlangen-Nürnberg
P Schmuki - Friedrich-Alexander-Universität Erlangen-Nürnberg
Publication Details: Journal of the Electrochemical Society, Vol.148(9), pp.C640-C646
Publisher: Electrochemical Society
Identifiers: 9934321208331
Academic Unit: King Abdulaziz University
Language: English
Resource Type: Journal article