CF4 decompositions using streamer- and glow-mode in Dielectric barrier discharges

Journal article

Peer reviewed

Yongho Kim, Kwan-Tae Kim, MIN SUK Cha, Young-Hoon Song and SEOCK JOON Kim

IEEE transactions on plasma science, Vol.33(3), pp.1041-1046

01/06/2005

Abstract

Chemical synthesis; combustion synthesis

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Materials science

Materials synthesis; materials processing

Physics

1 Record Views

Title: CF4 decompositions using streamer- and glow-mode in Dielectric barrier discharges
Creators - without role: Yongho Kim - Los Alamos National Laboratory
Kwan-Tae Kim - Korea Institute of Machinery and Materials
MIN SUK Cha - Korea Institute of Machinery and Materials
Young-Hoon Song - Korea Institute of Machinery and Materials
SEOCK JOON Kim - Korea Institute of Machinery and Materials
Publication Details: IEEE transactions on plasma science, Vol.33(3), pp.1041-1046
Publisher: Institute of Electrical and Electronics Engineers
Identifiers: 9942515308331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article