CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS

Journal article

V K Raman, F Mahmood, R A Mcmahon, H Ahmed, C Jeynes, K W Hutt, N Cooper and D J Godfrey

01/03/1988

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Title: CHARACTERIZATION OF RAPID ELECTRON-BEAM ANNEALED THIN TITANIUM SILICIDE FILMS
Creators - without role: V K Raman
F Mahmood
R A Mcmahon
H Ahmed
C Jeynes
K W Hutt
N Cooper
D J Godfrey
Publisher: ELECTROCHEMICAL SOC INC
Identifiers: 9941553508331
Academic Unit: King Abdullah University of Science & Technology
Resource Type: Journal article