Abstract
Nowadays, modern sensors have signal processing units for error compensation. The basis for the selection of the correction algorithm is an exact analysis of sensor transfer behavior: This paper describes the transfer behavior of pressure sensors obtained from various experiments. Conclusions, drawn from experimental results, were used for development of a calibration algorithm. For that, a compensation function based on a polynomial with twelve coefficients is applied. Because the polynomial coefficients are stored in an EEPROM a new calibration of transmitter is possible any time. A microprocessor circuit was designed compensating systematic errors of piezoresistive pressure and humidity sensors. Contrary to most compensation algorithms the sensor chip was calibrated in connection with the signal processing of the circuit. Therefore, the induced errors of analog devices do not have to be considered. The mean accuracy of circuits is about 0.2% FS.