Abstract
The thermal quality factor is the most significant parameter of the micro/nanobeam resonator. Less energy is released by vibration and low damping, which results in greater efficiency. Thus, for a simply supported microbeam resonator made of silicon (Si), a thermal analysis of the thermal quality factor was introduced. A force due to static prestress was considered. The governing equations were constructed in a unified system. This system generates six different models of heat conduction; the traditional Lord-Shulman, Lord-Shulman based on classical Caputo fractional derivative, Lord-Shulman based on the Caputo-Fabrizio fractional derivative, traditional Tzou, Tzou based on the classical Caputo fractional derivative, and Tzou based on the Caputo-Fabrizio fractional derivative. The results show that the force due to static prestress, the fractional order parameter, the isothermal value of natural frequency, and the beam's length significantly affect the thermal quality factor. The two types of fractional derivatives applied have different and significant effects on the thermal quality factor.