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Characterization of the performance of capacitive switches activated by mechanical shock
Journal article   Peer reviewed

Characterization of the performance of capacitive switches activated by mechanical shock

Mohammad I Younis, Fadi M Alsaleem, Ronald Miles and QUANG SU
Journal of micromechanics and microengineering, Vol.17(7), pp.1360-1370
01/07/2007
PMCID: PMC3123898
PMID: 21720493

Abstract

Applied sciences Electronics Exact sciences and technology General Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microelectronic fabrication (materials and surfaces technology) Micromechanical devices and systems Physics Precision engineering, watch making Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices

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