Abstract
Thermal and mechanical relaxation times play essential roles in the thermal quality factor (Q - factor) of the micro-resonators, where controls the energy damping through the coupling of thermal and mechanical behavior. In this work, we developed an analytical mathematical model that assumed a pre-stress in a two-temperature micro-viscothermoelastic resonator of silicon to modify the thermal and mechanical relaxation times and thus increase the thermal quality factor. The impacts of length-scale and pre-stress on the thermal quality factor have been discussed. The present model predicts that significant enhancement in terms of thermal quality factors is enabled by tuning the static-pre-stress, the thermal and mechanical relaxation times parameters. The isothermal value of frequency and the two-temperature parameter have impact effects on the thermal quality factor of the micro-resonators. (C) 2020 The Authors. Published by Elsevier B.V. on behalf of Faculty of Engineering, Alexandria University.