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Characterization of wet-etched GaAs (100) surfaces
Journal article   Peer reviewed

Characterization of wet-etched GaAs (100) surfaces

M. Rei Vilar, J. El Beghdadi, F. Debontridder, R. Artzi, R. Naaman, A. M. Ferraria and A. M. Botelho do Rego
Surface and interface analysis, Vol.37(8), pp.673-682
08/2005

Abstract

AFM ATR/MIR GaAs HREELS oxide wet-etching XPS

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