Abstract
Chemical bonding states and electrical characteristics of a nitrided high-k/Ge gate stack formed as a compositional transition layer at TiO(2)/Ge interface has been examined. Thin TiO(2) have been deposited on p-type Ge (100) substrates by plasma enhanced CVD. The stoichiometry and chemical states are investigated by x-ray photoelectron spectroscopy. Depth profile XPS analyses revealed the formation of TiO(x)N(y) and GeO(x)N(y) after plasma nitridation. Peak decomposition technique was employed to identify the composition and the chemical states of the film. Stoichiometric TiO(2) observed at the surface layer is found to reduce to Ti-suboxides after Ar(+) ion sputtering. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3545937] All rights reserved.