Chemical vapor deposition and electrical characterization of sub-10 nm diameter InSb nanowires and field-effect transistors

Rajat Kanti Paul; Miroslav Penchev; Jiebin Zhong; Mihrimah Ozkan; Maziar Ghazinejad; Xiaoye Jing; Emre Yengel; Cengiz S. Ozkan

doi:10.1016/j.matchemphys.2010.01.056

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Chemical vapor deposition and electrical characterization of sub-10 nm diameter InSb nanowires and field-effect transistors

Journal article

Peer reviewed

Chemical vapor deposition and electrical characterization of sub-10 nm diameter InSb nanowires and field-effect transistors

Rajat Kanti Paul, Miroslav Penchev, Jiebin Zhong, Mihrimah Ozkan, Maziar Ghazinejad, Xiaoye Jing, Emre Yengel and Cengiz S. Ozkan

Materials chemistry and physics, Vol.121(3), pp.397-401

01/06/2010

DOI: https://doi.org/10.1016/j.matchemphys.2010.01.056

Abstract

Crystal structure

CVD

Field-effect transistor

InSb nanowires

Semiconductor

Synthesis of InSb nanowires using a chemical vapor deposition technique, as a function of growth temperature and time, was investigated. High aspect ratio InSb nanowires, having a diameter of about 5–10 nm, were grown at 400 °C for 1 h on InSb (1 1 1) substrate onto which 60 nm Au particle was used as a metal catalyst. The synthesized InSb nanowires had zinc blend single crystal structure without any stacking faults, and they were covered with a thin (∼1 nm thick) amorphous layer. Electrical characterization of InSb nanowires was conducted utilizing a back-gated SNWFET. Device characterization demonstrated that NWs were n-type and exhibited a high I on/ I off ratio of 10 6 and device resistance of 250 kΩ.

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Title: Chemical vapor deposition and electrical characterization of sub-10 nm diameter InSb nanowires and field-effect transistors
Creators - without role: Rajat Kanti Paul - University of California, Riverside
Miroslav Penchev - University of California, Riverside
Jiebin Zhong - University of California, Riverside
Mihrimah Ozkan - University of California, Riverside
Maziar Ghazinejad - University of California, Riverside
Xiaoye Jing - University of California, Riverside
Emre Yengel - University of California, Riverside
Cengiz S. Ozkan - University of California, Riverside
Publication Details: Materials chemistry and physics, Vol.121(3), pp.397-401
Publisher: Elsevier B.V
Identifiers: 9942224408331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article