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Comparative measurements of the piezoelectric coefficient of a lead zirconate titanate film by piezoresponse force microscopy using electrically characterized tips
Journal article

Comparative measurements of the piezoelectric coefficient of a lead zirconate titanate film by piezoresponse force microscopy using electrically characterized tips

Heh-Nan Lin, Sy-Hann Chen, Shu-Te Ho, Ping-Ren Chen and I-Nan Lin
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol.21(2), pp.916-918
01/03/2003

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