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Comparison of effective work function extraction methods using capacitance and current measurement techniques
Journal article   Peer reviewed

Comparison of effective work function extraction methods using capacitance and current measurement techniques

Huang-Chu Wen, Rino Choi, G Brown, T BosckeBoscke, K Matthews, H Harris, Kisik Choi, H Alshareef, Hongf Luan, G Bersuker, …
IEEE electron device letters, Vol.27(7), pp.598-601
01/07/2006
DOI: https://doi.org/10.1109/LED.2006.876324

Abstract

Correlation Electrodes Extraction Gates Mathematical analysis Oxides Terraced Work functions
The effective work function (EWF) extracted on terraced oxide structures by capacitance-voltage-based techniques was compared with the work function calculated from the barrier height extracted by current-voltage measurements. The results show a reasonable correlation-within +/- 0.1 eV-in the EWF values for various metal gate electrodes, validating both techniques for EWF extraction.

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