Decomposition and Uniformity of Material Gases in GaN MOVPE

Journal article

A. Hirako and K. Ohkawa

Physica status solidi. A, Applied research, Vol.194(2), pp.489-493

12/2002

Abstract

47.70.Fw

81.05.Ea

82.33.Ya

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Title: Decomposition and Uniformity of Material Gases in GaN MOVPE
Creators - without role: A. Hirako - Tokyo University of Science
K. Ohkawa - Tokyo University of Science
Publication Details: Physica status solidi. A, Applied research, Vol.194(2), pp.489-493
Publisher: WILEY-VCH Verlag
Number of pages: 5
Identifiers: 9941300108331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article