Abstract
Deformable differential semiconductor sensors of pressure and compressive displacement having two inputs and one output were fabricated. For the fabrication of the sensors the rubbing in technology was used to form conductive-semiconductive-conductive layered structure on a rubber substrate. The rubber substrate was doped with carbon nanotubes (CNTs) and mixture of CNTs-H2Pc (50:50 wt.% CNTs-metal free phthalocyanine) to form conductive and semiconductive layers, respectively. The dimensions of the rubber substrates were 2.5 x 1.5 x 0.5 cm(3). Thickness of the CNT and CNT- H2Pc composites layers were in the range of 29-33 mu m, while their length and the width were 5-6 mm and 2-3 mm, respectively. It was found that the output resistance and the impedance of the sensor either decreased or increased depending on the input. The sensor showed high sensitivity of resistance and impedance under the effects of pressure (up to 240 gf/cm(2)) and displacement (up to 500 mu m). For practical applications the fabricated sensors may be used for determining pressure and compressive displacement.