Dewetting of resist/metal bilayers in resist stripping processes

Journal article

Y Wu, P Qiao, T Chong, T.-S Low, H Xie, P Luo, Z Guo and J Qiu

21/05/2001

Abstract

10.1063/1.1374234 Applied Physics Letters 78 21 3361-3363 APPLA

1 Record Views

Title: Dewetting of resist/metal bilayers in resist stripping processes
Creators - without role: Y Wu
P Qiao
T Chong
T.-S Low
H Xie
P Luo
Z Guo
J Qiu
Identifiers: 9941736408331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article