Diaphragm shape effect on the performance of foil-based capacitive pressure sensors

Journal article

Open access

Peer reviewed

AIP advances, Vol.10(1), pp.15009-015009-5

01/01/2020

Files and links (1)

url

https://doi.org/10.1063/1.5128475View

Published (Version of record) Open

1 Record Views

Title: Diaphragm shape effect on the performance of foil-based capacitive pressure sensors
Creators - without role: S. M. Khan - King Abdullah University of Science and Technology
R. B. Mishra - International Institute of Information Technology, Hyderabad
N. Qaiser - King Abdullah University of Science and Technology
A. M. Hussain - International Institute of Information Technology, Hyderabad
M. M. Hussain - University of California, Berkeley
Publication Details: AIP advances, Vol.10(1), pp.15009-015009-5
Identifiers: 9942030008331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article