Abstract
In this study, thin films of antimony zinc oxide were prepared at room temperature using the magnetron co-sputtering technique. The power on Sb target was varied from zero watt to 20 watt, whereas the power on ZnO target was fixed at 100 watt. The contents of the constituents of Sb-ZnO was determined using energy dispersive X-ray (EDX) spectrometry. The structural quality and surface morphology of the films were studied using X-ray diffraction (XRD) and scanning electron microscopy (SEM), respectively. Spectroscopic ellipsometery was used to determine the structural and optical properties of polycrystalline Sb-ZnO thin films under test. To evaluate ellipsometric measurements the Tauc-Lorenz model was used. The ellipsometric investigation showed, that the optical band gap decreased with increasing the ratio of Sb. The refractive index showed a decrease with increasing the content of Sb in addition to its behavior as a normal dispersion.