Abstract
β-In
2−
x
Al
x
S
3
thin films have been grown on glass substrate by chemical bath deposition for different value of Al concentration
y
= (([Al])/([In]))
sol
(0 ≤
y
≤ 5 at.%). Samples have been characterized using X-ray diffraction, atomic force microscopy and by spectrophotometric measurements. The influence of the increase of
y
ratio in the structural and optical properties are described and discussed in terms of crystallinity improvement. In order to increase film thickness of β-In
2−
x
Al
x
S
3
, we have been realized multi-deposition system. The structural, the surface morphology as well as the optical properties seem to be improved as the film thickness is of about 1200 nm.