Sign in
Effect of Secondary Electron Emission on the Sheath in SPT Chamber
Journal article   Peer reviewed

Effect of Secondary Electron Emission on the Sheath in SPT Chamber

Xue Zhonghua, Zhao Xiaoyun, Wang Feng, Liu Jinyuan, Liu Yue, Gong Ye and Zhonghua Xue
Plasma science & technology, Vol.11(1), pp.57-61
01/02/2009

Abstract

Metrics

1 Record Views

Details