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Effects of the high-temperature-annealed self-buffer layer on the improved properties of ZnO epilayers grown by helicon-wave-excited-plasma sputtering epitaxy on a -plane sapphire substrates
Journal article   Peer reviewed

Effects of the high-temperature-annealed self-buffer layer on the improved properties of ZnO epilayers grown by helicon-wave-excited-plasma sputtering epitaxy on a -plane sapphire substrates

T Koyama, A Fouda, N Shibata and S Chichibu
Journal of applied physics, Vol.102(7), pp.073505-073505-4
01/10/2007

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