Abstract
Reflection high-energy electron diffraction observation during the growth of ZnTe-ZnS strained-layer superlattices shows that sharp streaks of the substrate were replaced by a spotty pattern which eventually elongated into streaks. X-ray diffraction data of the superlattice with small period show satellite peaks around an intense central peak. These studies indicate a good superlattice structure for the samples with small (<50 Å) periods.