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Electrothermally excited silicon beam mechanical resonators
Journal article   Peer reviewed

Electrothermally excited silicon beam mechanical resonators

M. B Othman and A Brunnschweiler
Electronics letters, Vol.23(14), pp.728-730
02/07/1987

Abstract

Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronic circuits Electronics Exact sciences and technology Oscillators, resonators, synthetizers

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