Ellipsometric Evaluation of the Optical Constants of Zirconium Oxynitride Thin Films Deposited by Reactive Pulsed Magnetron Sputtering

Journal article

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Acta physica Polonica, A, Vol.124(1), pp.141-145

07/2013

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Title: Ellipsometric Evaluation of the Optical Constants of Zirconium Oxynitride Thin Films Deposited by Reactive Pulsed Magnetron Sputtering
Creators - without role: I.B.I. Tomsah - Qassim University
Publication Details: Acta physica Polonica, A, Vol.124(1), pp.141-145
Identifiers: 9928959608331
Academic Unit: Qassim University
Language: English
Resource Type: Journal article