Abstract
The performance and efficiency of AlGaN ultraviolet light-emitting diodes have been limited by the extremely low light-extraction efficiency (LEE) due to the intrinsic material properties of AlGaN. Here, to enhance the LEE of the device, we demonstrate an AlGaN nanowire light-emitting diode (NW-LED) integrated with nitride/air distributed Bragg reflector (DBR) nanogratings. Compared to a control device (only mesa), the AlGaN NW-LED with the nitride/air DBR nanogratings exhibits enhancement in the light output power and external quantum efficiency (EQE) by a factor of ∼1.67. The higher light output power and EQE are attributed mainly to the multiple reflectances laterally for the transverse magnetic (TM)-polarized light and scattering introduced by the nanogratings. To further understand the LEE enhancement, the electrical field distribution, extraction ratio, and polar pattern of the AlGaN NW-LED with and without the nitride/air DBR nanogratings were analyzed using the finite-difference time-domain method. It was observed that the TM-field emission was confined and scattered upward, whereas the polar pattern was intensified for the AlGaN NW-LED with the nanogratings. Our approach to enhance the LEE via the nitride/air DBR nanogratings can provide a promising route for increasing the efficiency of AlGaN-based LEDs, also, to functioning as facet mirror for AlGaN-based laser diodes.