Abstract
This paper introduces three methods to increase the output power of the vibration based electrostatic MEMS energy converters. This will be done by taking the effect of the parallel capacitance of the converter in the output power equation. In addition the output power of the converter will be increased by two other ways: Firstly, by depositing dielectric materials on the sidewalls of the converter fingers, secondly, by increasing the converter thickness. In addition the output power will be increased to an optimum value by combining the effect of increasing the device thickness and depositing dielectric materials on the sidewalls of the converter fingers.