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Exact Analytical Solution for the Critical Layer Thickness of a Lattice-Mismatched Heteroepitaxial Layer
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Exact Analytical Solution for the Critical Layer Thickness of a Lattice-Mismatched Heteroepitaxial Layer

C. Hadj Belgacem and M. Fnaiech
Journal of electronic materials, Vol.39(10), pp.2248-2250
01/10/2010

Abstract

Engineering Engineering, Electrical & Electronic Materials Science Materials Science, Multidisciplinary Physical Sciences Physics Physics, Applied Science & Technology Technology
Based on the Lambert W-function, an exact analytical solution for the critical thickness of a lattice-mismatched heteroepitaxial layer is presented. The new expression in exact and algebraic closed form eliminates the need for complex iterative computation. Its high accuracy is proved by comparison of the calculated critical thickness versus fractional atomic content of an alloy epilayer with the respective numerical solution.

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