Experimental and theoretical study of the cracking behavior of sol-gel-derived SiO2 film on InP substrate

Journal article

Peer reviewed

J Liu, Y. L Lam, Y. C Chan, Y Zhou, B. S Ooi and Z. S Yun

Applied physics. A, Materials science & processing, Vol.70(3), pp.341-343

01/03/2000

Abstract

Condensed matter: structure, mechanical and thermal properties

Cross-disciplinary physics: materials science; rheology

Exact sciences and technology

Materials science

Materials synthesis; materials processing

Mechanical and acoustical properties

Physical properties of thin films, nonelectronic

Physics

Sol-gel processing, precipitation

Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)

1 Record Views

Title: Experimental and theoretical study of the cracking behavior of sol-gel-derived SiO2 film on InP substrate
Creators - without role: J Liu - Nanyang Technological University
Y. L Lam - Nanyang Technological University
Y. C Chan - Nanyang Technological University
Y Zhou - Nanyang Technological University
B. S Ooi - Nanyang Technological University
Z. S Yun - Nanyang Technological University
Publication Details: Applied physics. A, Materials science & processing, Vol.70(3), pp.341-343
Publisher: Springer
Identifiers: 9943236208331
Academic Unit: King Abdullah University of Science & Technology
Language: English
Resource Type: Journal article