Abstract
In this letter, modeling, analysis, and experimental investigation for a resonant MEMS switch are presented. The resonant switch harnesses its mechanical resonance to lower the required actuation voltage by a substantial factor over the switch with static actuation. With alternating actuation voltage at its mechanical resonance frequency of 6.6 kHz, the average capacitance is tuned by changing the gap between fixed and movable electrodes. Based on the proposed actuation method, the device offers 57.44% lower actuation voltage compared with the switch with static actuation. Published by AIP Publishing.