Abstract
CuAlO
2 thin films have been grown on glass substrates using spray technique; a low-cost method of thin films depositing. The deposition was carried out in a 450–525
°C range of substrate temperature. The solution and gas flow rates were kept constant at 5
cm
3
min
−1 and 6.10
−3
m
3
min
−1, respectively. Compressed air was used as a carrier gas. The structural, morphological and optical properties of these thin films have been studied. These properties are strongly related to the substrate temperature and to the [Cu]/[Al] molar ratio
r. X-ray diffraction analysis confirmed the initial amorphous nature of as-deposited films and phase transition into crystalline CuAlO
2 with the preferential orientation (1
0
1) upon annealing at 570
°C. The optical transmission of 80% has been achieved in the visible spectrum. CuAlO
2 band gap energy in the range of 3.34–3.87
eV has been found by optical measurement depending on fabrication parameters.