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Fabrication and characterization of anatase/rutile–TiO 2 thin films by magnetron sputtering: a review
Journal article   Open access  Peer reviewed

Fabrication and characterization of anatase/rutile–TiO 2 thin films by magnetron sputtering: a review

Sakae Tanemura, Lei Miao, Wilfried Wunderlich, Masaki Tanemura, Yukimasa Mori, Shoichi Toh, Kenji Kaneko and H. Awaji
Science and technology of advanced materials, Vol.6(1), pp.11-17
2005

Abstract

Bactericidal ability Epitaxial growth Helicon RF magnetron sputtering Optical properties Surface treatment TiO 2 thin film
url
https://doi.org/10.1016/j.stam.2004.06.002View
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