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Fabrication of Mo/Cu multilayer and bilayer transition edge sensors
Journal article   Peer reviewed

Fabrication of Mo/Cu multilayer and bilayer transition edge sensors

Z.A. Ali, O.B. Drury, M.F. Cunningham, J.M. Chesser, T.W. Barbee and S. Friedrich
IEEE transactions on applied superconductivity, Vol.15(2), pp.526-529
01/06/2005
DOI: https://doi.org/10.1109/TASC.2005.849897

Abstract

Device fabrication Energy resolution Fabrication Gamma ray detectors gamma-ray spectrometers Mo/Cu multilayers Neutrons Nonhomogeneous media Spectroscopy Superconducting materials Superconducting photodetectors superconducting transition edge sensors Temperature sensors Thermal conductivity x-ray spectrometers
We are developing cryogenic high-resolution X-ray, Gamma-ray and neutron spectrometers based on superconducting Mo/Cu transition edge sensors. Here we discuss the sensor design for different applications, present the photolithographic fabrication techniques, and outline future detector development to increase the spectrometer sensitivity.

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