Abstract
In this work, we report on the fabrication of disposable flexible substrates dedicated to the Surface-Enhanced Raman Scattering (SERS) technique. The transfer of pyramidal features elaborated on silicon wafers towards flexible plastic foil is performed via a two-steps nanoimprint process. Gold coated normal and inverted square pyramids patterned on the master silicon molds are reproduced with fidelity into a double-layer flexible plastic foil. SERS spectroscopy characterization was performed on the master SERS devices as well as on the final polymeric duplicated structures. Both, masters and replica, were shown to exhibit a good Raman signal enhancement. Moreover, this fabrication procedure was shown to be compatible with the use of large size substrates and well-mastered collective fabrication techniques. As a consequence, the developed SERS-active polymeric devices combine cost effectiveness and a high application potential in various detection and process control domains.
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•Fabrication of superhydrophobic flexible film by nanoimprint lithography•The effects of printing conditions on hydrophobic behavior of flexible film•The effects of patterns geometry on hydrophobic behavior of flexible film•Fluorine transfer on silicon master after imprinting process