Abstract
By the solvent vaporization convection self-assembly method, silica colloidal crystal template was prepared. At 200 degrees C, using GeH4 as the precursor gas, plasma enhanced chemical vapour deposition method was then used to fill the high refractive index material germanium, and germanium inverse opal photonic crystal was obtained. At the temperature lower than the temperature of thermal decomposition, GeH4 filling of germanium is realized. The morphology, composition, and optical property of the resulting samples were characterized by scanning electron microscopy, X-ray diffraction and Fourier transform microscopic IR spectroscopy. Results show that of germanium is amorphous, it is transformed into polycrystalline state by annealing. The germanium is homogeneously distributed inside the voids of silica template. The reflective spectrum of the sample has remarkable optical reflective peaks and shows the photonic band gap effects. The center wavelength of the photonic band gap lies in 1650nm and 2640nm. Ther