Abstract
The authors have successfully fabricated stationary micro-optical shutter arrays based on the well-known transmitting semiconductor (on) to the reflecting metallic (off) phase transition of thermochromic W-doped VO2 active layers operating at room temperature and driven by an external voltage. This shutter consists of 16 active planar micro-optical slits for which the optical switching (either transmittance or reflectance) can be controlled individually. This allows performing any desirable on-off switching combinations. The current-voltage characteristic of the micro-slit shows that the current jumps when the phase transition occurs. Transmittance switching as high as 25 dB and reflectance switching of about 6 dB were achieved with this device at X = 1.55 mu m. Therefore, this electrically controllable V02-array can be used as a stationary Hadamard shutter to increase the sensitivity of infrared spectrometers. (C) 2008 American Vacuum Society.