Abstract
This study presents the electrical properties of Fe2O3 based humidity sensors fabricated by the use of Fe2O3 powder and silicone liquid adhesive. For the fabrication of Cu/Fe2O3-Adhesive/Cu sensors, Fe2O3 powder was mixed in a 50 wt. % silicon liquid adhesive and then deposited between copper electrodes. These preliminary deposited Cu electrodes having 40 mu m gap between them were deposited on glass substrates by vacuum thermal evaporation. The capacitance and dissipation of the sensors were measured under the effect of relative humidity (RH) and the resistance was calculated. It was found that with increase in humidity from 54%-94%, the resistance of the sensors decreases by 6375 times and capacitance increases by 5714 times respectively. The resistance and the capacitance-humidity relationships show significant change in the range of 54%-80% RH and 80%-94% RH respectively. The humidity dependent properties of the sensor make it attractive to be use in capacitive and resistive type humidity sensors. Thus it can be used in the humidity meters for environmental monitoring and assessment purposes.