Formation of silicon hydride using hyperthermal negative hydrogen ions (H-) extracted from an argon-seeded hydrogen sheet plasma source

Journal article

Peer reviewed

Marcedon S. Fernandez, Gene Q. Blantocas and Henry J. Ramos

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, Vol.266(23), pp.4987-4993

01/12/2008

Abstract

Instruments & Instrumentation

Nuclear Science & Technology

Physical Sciences

Physics

Physics, Atomic, Molecular & Chemical

Physics, Nuclear

Science & Technology

Technology

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Title: Formation of silicon hydride using hyperthermal negative hydrogen ions (H-) extracted from an argon-seeded hydrogen sheet plasma source
Creators - without role: Marcedon S. Fernandez - University of San Carlos
Gene Q. Blantocas - University of the Philippines Diliman
Henry J. Ramos - University of the Philippines Diliman
Publication Details: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, Vol.266(23), pp.4987-4993
Publisher: Elsevier
Number of pages: 7
Identifiers: 9928383308331
Academic Unit: Qassim University
Language: English
Resource Type: Journal article