Abstract
We report the implementation of the Fourier Ptychographic Microscopy (FPM) technique, a phase retrieval technique, at telecommunication wavelengths using a low-coherence ultrafast pulsed laser source. High quality images, near speckle-free, were obtained with the proposed approach. We demonstrate that FPM can also be used to image periodic features through a silicon wafer.
•Fourier Ptychographic Microscopy (FPM) implemented at telecommunication wavelength range.•High resolution images were obtained using an ultra-fast laser and FPM.•Speckle free images were also acquired.•FPM can be used to image samples through a silicon wafer.•Above technique will find multiple applications in the semiconductor industry.