Abstract
TiO2:Co thin films were epitaxially grown in the form of single layer and digital alloy on LaAlO3 substrates by sputtering techniques. A wide range of saturation moment (ms) up to 1.51μB/Co were obtained, depending on both Co content and deposition parameters. Surface morphology of the films seems to suggest the existence of Co clustering. However, higher ms value is not obtained from the films with the larger and denser clustering, implying that both charge carriers and Co clustering are contributing to the overall magnetism of the sample.