Growth, composition and structure of plasma-deposited siloxane and silazane

Journal article

Peer reviewed

S Sahli, Y Segui, S HADJ MOUSSA, M. A Djouadi and Shaaban H. Moussa

Thin solid films, Vol.217(1-2), pp.17-25

30/09/1992

Abstract

Applied sciences

Exact sciences and technology

Organic polymers

Physicochemistry of polymers

Properties and characterization

Structure, morphology and analysis

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Title: Growth, composition and structure of plasma-deposited siloxane and silazane
Creators - without role: S Sahli - Université Constantine 2
Y Segui - Université Toulouse III - Paul Sabatier
S HADJ MOUSSA - Univ. Constantine, inst. electronique, 25000 Constantine, Algeria
M. A Djouadi - Université Constantine 2
Shaaban H. Moussa - Shaqra University
Publication Details: Thin solid films, Vol.217(1-2), pp.17-25
Publisher: Elsevier Science
Identifiers: 9929256808331
Academic Unit: Shaqra University
Language: English
Resource Type: Journal article