Growth of WSi2 in phosphorous-implanted W/«Si» couples

Journal article

Peer reviewed

E. Ma, B. S. Lim, M-A. Nicolet, N. S. Alvi and A. H. Hamdi

Journal of electronic materials, Vol.17(3), pp.207-211

05/1988

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Title: Growth of WSi2 in phosphorous-implanted W/«Si» couples
Creators - without role: E. Ma - California Institute of Technology
B. S. Lim
M-A. Nicolet - California Institute of Technology
N. S. Alvi - Delco Electronics Corporation, Kokomo
A. H. Hamdi - General Motors
Publication Details: Journal of electronic materials, Vol.17(3), pp.207-211
Identifiers: 9918718108331
Academic Unit: King Abdulaziz City for Science & Technology
Language: English
Resource Type: Journal article