- Title
- Growth of high-quality AlN layers on sapphire substrates at relatively low temperatures by metalorganic chemical vapor deposition
- Creators - without role
- Xiao-Hang Li - Georgia Institute of TechnologyShuo Wang - Arizona State UniversityHongen Xie - Arizona State UniversityYong O. Wei - Arizona State UniversityTsung-Ting Kao - Georgia Institute of TechnologyMd. Mahbub Satter - Georgia Institute of TechnologyShyh-Chiang Shen - Georgia Institute of TechnologyPaul Douglas Yoder - Georgia Institute of TechnologyTheeradetch Detchprohm - Georgia Institute of TechnologyRussell D. Dupuis - Georgia Institute of TechnologyAlec M. Fischer - Arizona State UniversityFernando A. Ponce - Arizona State University
- Publication Details
- physica status solidi (b), Vol.252(5), pp.1089-1095
- Publisher
- Blackwell Publishing Ltd
- Number of pages
- 7
- Identifiers
- 9941316008331
- Academic Unit
- King Abdullah University of Science & Technology
- Language
- English
- Resource Type
- Journal article
Journal article
Growth of high-quality AlN layers on sapphire substrates at relatively low temperatures by metalorganic chemical vapor deposition
physica status solidi (b), Vol.252(5), pp.1089-1095
05/2015
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