Abstract
In this paper we report poly N-isopropylacrylamide (NIPAAm) nanogel used as sensing medium in Rayleigh wave type surface acoustic wave (SAW) devices to measure relative humidity. NIPAAm is synthesized by single-step surfactant-free emulsion polymerization reaction method. The prepared nanogel particles have dimensions less than 180 nm. Dynamic light scattering (DLS) analysis of these particles shows increase in size of the particles up to 100% when dispersed in water at room temperature. In this work we have developed two types of relative humidity (RH) sensors. In the first type commercial SAW resonators with resonance frequency at 315MHz from EPCOS (TM) were used in our experiment. The casings of two resonators were removed carefully and one of them was left as such to serve as the reference device. The other was coated with the NIPAAm nanogel and used as the sensor. In the second type of SAW-based humidity sensor aluminum interdigital transducers (IDT) are fabricated over YZ lithium niobate piezoelectric substrate using metallization and lithography techniques. The fabricated IDTs have the pitch length of 34 mu m and a resonance frequency of 51.6 MHz. Response of sensor to RH is measured by measuring the scattering parameters of both the types of sensors and reference devices recorded using the network analyzer.