Abstract
Aiming at the efficiency and precision in micro electrical discharge machining (micro-EDM) is affected because the interpole voltage is unstable in conventional micro-EDM. This paper describes a five-degrees-of-freedom (5-DOF) controlled, wide-bandwidth, and high-precision magnetic levitation actuator. The conventional micro-EDM can install the actuator to maintain a stable interpole voltage between the electrode and workpiece to realize the high-speed micro-EDM. In this paper, the structure of the magnetic levitation actuator is designed, and the magnetic field characteristics are analyzed. On this basis, an integrator and regulator are used along with a controller with local current feedback to eliminate steady-state errors, stabilize the control system, and improve the bandwidth and positioning accuracy of the magnetic levitation actuator, and the dynamic performance of the actuator is evaluated. The experimental results show that the developed actuator has excellent positioning performance with micron-level positioning accuracy to meet the demand for the real-time, rapid, and accurate adjustment of the interpole gap during micro-EDM.