High Resolution Electron Microscopy of Al/Si and Al/Si3N4 Interfaces Prepared by Room Temperature Bonding Method

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Hideki Takagi, Yutaka Takahashi, Tadatomo Suga and Yoshio Bando

Nihon Kinzoku Gakkai shi (1952), Vol.55(8), pp.907-908

01/08/1991

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Title: High Resolution Electron Microscopy of Al/Si and Al/Si3N4 Interfaces Prepared by Room Temperature Bonding Method
Creators - without role: Hideki Takagi - The University of Tokyo
Yutaka Takahashi - The University of Tokyo
Tadatomo Suga - The University of Tokyo
Yoshio Bando - National Institute for Research in Inorganic Materials
Publication Details: Nihon Kinzoku Gakkai shi (1952), Vol.55(8), pp.907-908
Identifiers: 9951219708331
Academic Unit: King Saud University
Language: English
Resource Type: Journal article