Abstract
The convergent beam illumination method has previously been proposed in order to determine the atomic arrangement in surface or interface structures on the sub-nanometer order. This method reduces interference fringes that appear at the surface or interface, and the fine structure can be analyzed. In this paper, the atomic arrangement near a SrTiO3 interface is determined from a transmission electron microscope image taken with convergent beam illumination. A cycloidal undulated structure can be found at the interface that is caused from misorientation of two crystals on each side of the interface. This structure cannot be found from images taken under conventional condition, and therefore, it shows that the convergent beam illumination method is useful for analyzing the local structures.