Highly Manufacturable Deep (Sub-Millimeter) Etching Enabled High Aspect Ratio Complex Geometry Lego-Like Silicon Electronics

Journal article

Peer reviewed

Mohamed Tarek Ghoneim and Muhammad Mustafa Hussain

Small (Weinheim an der Bergstrasse, Germany), Vol.13(16), pp.1601801-n/a

25/04/2017

PMID: 28145623

Abstract

Chemistry

Chemistry, Multidisciplinary

Chemistry, Physical

Materials Science

Materials Science, Multidisciplinary

Nanoscience & Nanotechnology

Physical Sciences

Physics

Physics, Applied

Physics, Condensed Matter

Science & Technology

Science & Technology - Other Topics

Technology

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Title: Highly Manufacturable Deep (Sub-Millimeter) Etching Enabled High Aspect Ratio Complex Geometry Lego-Like Silicon Electronics
Creators - without role: Mohamed Tarek Ghoneim - King Abdullah University of Science and Technology
Muhammad Mustafa Hussain - King Abdullah University of Science and Technology
Publication Details: Small (Weinheim an der Bergstrasse, Germany), Vol.13(16), pp.1601801-n/a
Publisher: Wiley
Number of pages: 7
Grant note: King Abdullah University of Science and Technology (KAUST); King Abdullah University of Science & Technology
Identifiers: 9942319308331
Academic Unit: King Saud University
Language: English
Resource Type: Journal article