Abstract
We report on the fabrication of an advanced chemical capacitive sensor for the detection of sulfur dioxide (SO2) at roomtemperature. The sensing layer based on an indium metal-organic framework (MOF), namely MFM-300, is coated solvothermally on a functionalized capacitive interdigitated electrode. The fabricated sensor exhibits significant detection sensitivity to SO2 at concentrations down to 75 ppb, with the lower detection limit estimated to be around 5 ppb. The MFM-300 MOF sensor demonstrates highly desirable detection selectivity towards SO2 vs. CH4, CO2, NO2 and H-2, as well as an outstanding SO2 sensing stability.